UHP/Semiconductor Manufacture

Renowned for their accuracy, reliability and industry-leading depth of measurement, Servomex's Delta F range offers semiconductor manufacturers the outstanding solution for trace oxygen and moisture analysis.

Designed to help enable fabs to maintain extremely low levels of contaminants in their process gases – enabling higher process yields – the NanoTrace and DF-700 series are viewed as the industry standard in reliabile, accurate and stable analysis for measurements as low as parts-per-trillion.

Verified by independent experts as measuring oxygen to the lowest PPT levels available, the DF-550E NanoTrace and DF-560E NanoTrace II, the Nanotrace series delivers exceptional oxygen measurements at the percent, trace and ultra-trace PPT levels required in semiconductor manufacture.

Utilising the latest Tuneable Diode Laser Absorption Spectroscopy (TDL) technology, the the DF-700 series ensures the highly precise trace moisture measurements necessary for semiconductor manufacturer. Delivering highly accurate sub-ppb moisture level readings,  the DF-750,  DF-745  (high sensitivity 2ppb LD) and DF-740 (moisture in ammonia) are suitable for use in a full range of UHP measurement applications.

The Delta F series is augmented by the SERVOPRO Chroma, whose versatility in making low trace measurements amkes it ideal for monitoring UHP gases.

With our experienced sales and service teams supporting your plant through a global network of business and engineering centres, we bring expertise to UHP gas analysis – we’ll show you how.